81 ) SEMICONDUCTOR PROCESS EQPT.
App Materials OZONATOR Ozone Generator S/N 582 P/N 0010-09093 REV. J 7 x 19 x 18 D Needs Repair
(Item No. 3105)
Zenith G400-80-SS Ultra sonic cleaner w/10x14x10”hi SST tank needs tank plug 110v 15a repaired & tested $1,200
Branson B-125P 22" h x 16" w x 12" dp. Ultrasonic vapor degreaser for freon 120V 10A (Item No. Good $950
4600)
Branson PLD-101 2 R S/N4-6591-3 POR
18x18x19 & 18x18x26 Tanks
GCA 4600 Wafer stepper. 5" wafer stage, assorted plates (Item No. 3107) Very Good
Intl. Plasma dual 8"d x 14" lg barrell plasma etcher, 1500 W RF P.S. 208-240V 1ph, 39" h x 37" w x As Is $1,750
24" d, needs work, no MP (Item No. 4751)
Galiso-NUVAC MRP-203 ELC Hot gas Recirculation & Sweep System. Circulates inert gas thru Excellent POR
Vacuum chamber system to remove moisture & particulate. 208/230V 3ph 4 wire 12.7A 3HP
3ph 9.2A blower motor. Three KF-40 connections. Requires 18 CFM min. @ 100 millitorr external
dry pump. 19” w x 42 L x 45” hi caster cart. With Varian 990-CLD Turbo leak detector attached.
With Manual.
luoroware Systems 8230/116 Wash machine ALso available 8221-188 (Item No. 3085) Used
MET-ONE, Point 5 particle counter. Digital read out. DBS. No schematic. (Item No. 5114) As Is $450
Modulaire Flow Hood 33" x 33" x 8' L. 2 Blowers (Item No. 3097) As Is $400
Technics 3000-1 Plasma Desmear System. 36"d x 40"lg Alum. chamber. 3" ASA Temescal Poppet As Is $9,000
Valve. Pump system optional. ENI 3KW RF P.S. Vacuum General 80-4 flow monitors. Vac gauge
& control console. 40K Hz-100 Khz (Item No. 3083)
Temptronic TP37A5-1 Thermal Chuck control unit. No chuck. (Item No. 3099) Used $575
Temptronic TP450A semiconductor heat cycle test system, -60 to +150 C air stream. head, pwr unit, As Is $2,950
& controls (Item No. 4688)
Varian A-scope for deposition thickness measurement. Mod 980-4020 (Item No. 3103) $3,250
Zylin 4" Wafer dry etcher with three ENI 1600 Power supplies. (Item No. 3081) Very Good $10,000
