Cryo pumps

 

25  ) CRYO PUMPS & COMPRESSORS.

10" ASA Varian 917-5000 cryopump with Air Products Displex 204R expander. (Item No. 998)             As Is                                 $1,500

20" ASA, Air Products model DE-208R, AA-1615-4, 9" hi Flat cold head. 2L08W COMP, 7422 hrs.     As Is                                 $3,500

No press, water cooled. W/Refrig lines, needs rebuild (Item No. 4564)

 

6" ASA P. E./ULTEK Cryopump, Air Prod.  DE-202S.   A/C comp. & refrig. lines. (Item No. 990)         Rebuilt                              $3,750

6" ASA Perkin-Elmer cryopump with bellow vibration isolator.  Air Products DE-202-OSP (Item           As Is                                 $1,000

No. 992)

 

Air Prod. 1RO4W SL Compressor W/C 208/230V 1 ph. (Item No. 986)                                                    As Is                                 $1,000

Air Prod. 1RO4W SL Compressor W/C 220V 1 ph 50 Hz ,  11,676 Hrs 50 psi (Item No. 988)                As Is                                 $1,000

Air Products DE-202-OSP Cryopump AA-2117 on 6" CFF, Coldhead 31/2"D x9"Hi  55PSI (Item         As Is                                 $750

No. 984)

 

Air Products DE-202S cryopump on 8" CFF Pot w/3 ea 2 3/4" CFF, 12 PSI (Item No. 4573)                  As Is                                 $1,000

CTI #804451 Gas Heater 115AC,90Q 1/4" Swagelock (Item No. 1012)                                                     Good Used

CTI & Air Products cryopump helium lines.  Female on both ends 10 & 20 Ft.  One end can be                New                                  $250

converted to male for  Varian. (Item No. 981)

 

 

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Item                                                                                                                                                              Condition                       Price

CTI 1020R Compressor A/ C 0 Psi 2400 Hrs (Item No. 1006)                                                                   Good Used                       $5,500

CTI 1020RW compresssor W/C, 208/230v 3ph, 160 PSI, 5886 hrs (Item No. 4813)                                  Good                                $3,000

CTI 1020RW compresssor W/C, 208/230v 3ph (Item No. 4958)                                                                 Rebuilt                              $4,250

CTI 8 onboard cryopump fast regen sputtering 6" ANSI inlet vertical. [LHV] (Item No. 5026)                  Unused In Box                 $4,500

CTI 804 40060 cryopump regeneration controller. (Item No. 1014)                                                             Used                                 $795

  CTI 8080-265-K-001 Absorber kit for CTI MC compressor unit. (Item No. 1018)                                      Unused                            $250

CTI 8500 compressor  W/C.  208/230V 60HZ 3 ph. (Item No. 1008)                                                         Rebuilt                              $5,200

CTI 8510 compressor W/C, 208/230V 60Hz 3ph, for "onboard" pumps (Item No. 4822)                           Rebuilt                              $6,250

CTI 9600 compressor W/C, . (Item No. 5095)                                                                                             Rebuilt                              POR

CTI MC compressor, new absorber. 208-230/3ph. 160PSI, 36,491 hrs. w/c (Item No. 4574)                     Cleaned & Tested             $2,000

CTI onboard water pump with 10" conflat flanges (Item No. 5027)                                                             Rebuilt                               $8,500

CTI SC-21 compressor for CTI-7 cryopump (early) A/C.  150 PSI, 17,000 Hrs, (Item No. 1002)             Rebuilt                              $1,800

CTI SC-21 compressor, no absorber, comp. Broke and burned, needs welding, lots of work, parts            Poor                                  $250

only (Item No. 4712)

 

CTI SC-350 compressor for CTI-8 cryopump A/C (Item No. 1004)                                                           As Is                                 $1,250

CTI SC-350 compressor for CTI-8 cryopump W/C 0 hrs., 0 PSI, 208-230V 1 ph. 12A (Item No.             Unused                             $2,500

4675)

 

CTI silicon temperature indicator.  P/N 804 2002 G003 WC. (Item No. 1016)                                             Cleaned & Tested             $650

CTI-10, #8120852G001, 1050 on-board water pump with control module. 9" OD cryopanel, POR.          Used

(Item No. 5094)

 

CTI-10, 10" ASA temp. diode, P/N 808182 (Item No. 4716)                                                                      Rebuilt                              $5,500

CTI-7 cryopump w/10" CFF flg. Pressure gauge (Item No. 4569)                                                              Rebuilt                              $2,500

CTI-8 6" ASA, temp. diode #8033167 (Item No. 1000)                                                                              Rebuilt                              $4,500

CTI-8 NW 200 flg., temp. diode (Item No. 4638)                                                                                        Rebuilt                              $4,200

CTI-8 Roughing valve (NorCal) 3/4" NW-25,  1/8" TC gauge port 90 Air (Item No. 1022)                       Cleaned & Tested             $250

CTI-8F, 10" CFF on-board, Endura HP PVD System.  P/N 8116030G001. (Item No. 5093)                    Rebuilt

CTI 8011 Control Module

CTI 1020-CP Cryodyne

CTI 8300 p/n 8052000 w/c 175 psi

Ebara 2.1, 323 0014, Cryo compressor, 241hrs, 210psi, water cooled. (Item No. 4505)                             Rebuilt                              $2,250

 

Ebara 521-221 S/N 52M5336, 6" CFF sputter pump, will convert to std. Diode (Item No. 4961)               Unused                             $2,500

Ebera 522-222 cryopump with 208V 3ph, 8" conflat inlet. (Item No. 5029)                                                 As Is                                 $3,500

Ebera 323-1049 10”CFF HV-8 S/N C3D4005 2 wire diode

Ebara 323-8046 6”CFF HV-4 S/N C3H3781 2 wire diode

Ebara 323-2048 clamp FLG 9” ID IDENT FLG  S/N K3K 8846 2 wire diode

Ebara C-Cube cryopump Central Controller Ed No U 492460-08  1996-11                                               As Is                                 $1,000

Ebara 542-100 s/n Carlos 2 Integrated cryopump Controller No cables                                                      As Is                                 $1,500

L-H RPK-100 cryopump 89157, NW-100 flg. & RG-210 displacer 89195 (Item No. 4962)                       As Is                                 $350

L-H RPK-400 cryopump w/NW-100 flg. & RG-210 displacer. (Item No. 4570)                                         As Is                                $500

L-H RW-3 w/c comp. 26,031 hrs. 5 bar press. 208-230V, 1ph, 2KvA, . (Item No. 4571)                          As Is                                 $500

Lakeshore 818 silicon diode temp. monitor for CTI & others, WC. (Item No. 4959)                                    Repaired & Tested            $600

Varian # 313-1005. Cryostack 8 pump.  6" ASA. (Item No. 1028)                                                             As Is                                 $1,000

Varian 313-1005 Cyrostack 8 cryopump 6" ASA and 313-0010 w/c compressor w/gas lines.                   Rebuilt                              $5,000

208/240V 1 ph. (Item No. 1030)

 

Varian 313-0010 W/C compressor 140 psi, 5653 Hrs 208-220V  1 ph. (Item No. 1033)                            Good Used                       $1,500

Varian 313-0030 cryopump.  Cryostack 8.  6" ASA. (Item No. 1035)                                                        As Is                                 $1,100

 

 

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Item                                                                                                                                                              Condition                       Price

Varian 313-0010 W/C compressor 220 psi, 8055 Hrs 208-220V  1 ph. (Item No. 4794)                            Good Used                       $1,500

Varian 313-0010 w/c compressor, 140 PSI, 4332 hrs. (Item No. 4885)                                                      Good Used                       $2,000

Varian 315-1005 Cyrostack 12 pump 10" ASA (Item No. 4886)                                                                 Good Used                      $4,000

Varian 323-1111 Cryo pump w/ 10" CFF (Item No. 1039)                                                                         As Is                                $1,500

Varian 323-0014 W/C compressor 220 psi, 9047 Hrs. 208V, 1ph., 15 A (Item No. 4903)                          Used                                $1,500

Varian 323-0055 cryopump w/6” ASA FLG for sputtering.                                                                         As Is                               $800

Varian 323-5008 Displacer assy. No cryopump Pat. (Item No. 5092)                                                          As Is                                $350

Varian 917-0085  cryopump temp monitor.  115V. (Item No. 1026)                                                           Excellent                           $750

Varian 917-0070 Cryo regeneration control with 0-1000 Microns TC meter relay. (Item No. 1024)           As Is                                 $350

Varian Cryo with Air Products Displex DE-202OSP expander  mounted on 9 1/4" O.D.  O-R quick        As Is                                 $950

disconnect flg. (Item No. 995)